It's kind of a dumb question. It's like who would win between superman and a police officer. Samus is just in a different league. Master chief gets hit by a tank, he dies. Samus gets stepped on by a four story tall war machine (metroid prime 2, quadraxis) and she shruggs it off. he gets hit by a rocket, he dies. She gets hit by huge mounted energy cannons (various points in the prime series, manned by pirates) and she gets knocked back a few feet. He gets hit by an energy sword, he dies. Energy swords barely scratch her armor. Grenade, he dies, she yawns, jeep, he dies, she throws it out of the way, machine guns shorts bursts of sustained fire he dies, it bounces off her. She can survive antimatter blasts, and various other forms of super technology.
When it comes down to it, Master chief is engineered by an advanced human race wearing some high tech armor. Samus is engineered from a race so advanced it helped develop civilization across the universe before leaving behind their physical bodies and becoming one with the universe, and she's wearing their ultimate weapon. She's practically a demigod of war compared to his being a slightly buffed soldier. It's not even a contest unless you gimp her and give him everything he can possibly use.

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