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In a straight comparison, I can't really do that. Mario 64 had a small hub and was very level based within the paintings, OoT was about as open world as a game could get back then. And Metroid Prime 1 was a GameCube game, which has a massive power advantage over the 64.

The only way I could compare them is who made the best leap forward compared to their mostly powerful and most recent predecessor. So...

Super Mario World --> Mario 64
Super Metroid --> Metroid Prime 1
A Link to the Past --> Ocarina of Time

And... My head just exploded. I still can't lol. They all were such great sequels that evolved their series so much. None of them are far ahead of the others.