For me, Mario 64. It was the first to do it really, really well and for that it deserves credit. It had to reinvent it's core gameplay, shift perspective, deal with camera control for the first time ever and gave a lesson in how to leverage 3D space for added gameplay opportunities as opposed to something that simply added difficulty to the controls. Zelda is simply built off Mario 64 and Metroid had an extra generation of 3D maturity to help it make the transition.
Haven't played enough of the others to comment.







