Rhonin the wizard on 19 May 2021
https://hexus.net/tech/news/industry/147822-tsmc-partners-announce-1nm-process-breakthrough/
"An important paper on semiconductor technology penned by research scientists from Taiwan Semiconductor Manufacturing Company (TSMC), the National University of Taiwan (NTU), and Massachusetts Institute of Technology (MIT) has been published by Nature (spotted via Verdict). The tripartite have announced a breakthrough in the use of 'beyond-silicon' and 2D materials in electronics. The research provides a path to electronics manufacturing processes of 1nm and lower, helping break past the limits of current semiconductor tech and materials."
