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1. Prime
2. Prime 2
3. Fusion
4. Zero Mission
5. Hunters
6. Prime 3

I haven't played Other M but from what I've seen and read it would be below Prime 3 there. The mistake of Prime 3, Fusion and Other M is to introduce a story line/voice acting; the mistake of Prime 3, Hunters and Other M is to make the game a linear FPS rather than the more open exploration of Prime and Metroid I.

Interestingly I'd rate the music composition in the same order. I believe there's significant correlation between game quality and music quality.